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Keywords: polysilicon
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021002.
Paper No: JMNM-22-1020
Published Online: September 27, 2022
... the capabilities of MacEtch to polysilicon which has potential to enable high-volume and cost-sensitive applications such as optical metasurfaces, anodes for high capacity and flexible batteries, electrostatic supercapacitors, sensors, nanofluidic deterministic lateral displacement devices, etc. This work presents...