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Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul Lema Galindo, Paras Ajay, S V Sreenivasan

J. Micro Nano-Manuf.

Paper No: JMNM-22-1035

DOI: https://doi.org/10.1115/1.4062167

Published Online: March 21, 2023

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Topics: Etching, Manufacturing, Metals, Nanoscale phenomena, Silicon, Plasma etching, Nanowires, Flow (Dynamics), Hardware, Microscale devices

Journal Articles

Metal Assisted Chemical Etch of Polycrystalline Silicon

Crystal Barrera, Paras Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan

J. Micro Nano-Manuf. June 2022, 10(2): 021002.

Paper No: JMNM-22-1020

DOI: https://doi.org/10.1115/1.4055401

Published Online: September 27, 2022

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Topics: Polysilicon, Metals, Columns (Structural), Etching, Silicon

Journal Articles

Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Changlin Liu, Jianning Chu, Jinyang Ke, Xiao Chen, Jianguo Zhang, Junfeng Xiao, Jianfeng Xu

J. Micro Nano-Manuf. June 2021, 9(2): 021002.

Paper No: JMNM-20-1029

DOI: https://doi.org/10.1115/1.4050969

Published Online: May 10, 2021

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Topics: Cutting, Molecular dynamics, Silicon, Simulation, Wear, Diamond tools, Nanoscale phenomena

Journal Articles

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Brian Gawlik, Ariel R. Barr, Akhila Mallavarapu, Edward T. Yu, S. V. Sreenivasan

J. Micro Nano-Manuf. March 2021, 9(1): 010904.

Paper No: JMNM-20-1008

DOI: https://doi.org/10.1115/1.4049959

Published Online: February 26, 2021

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Topics: Computers, Delays, Etching, Flaw detection, Glass, Imaging, Manufacturing, Particulate matter, Root cause analysis, Semiconductor wafers

Journal Articles

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Robert M. Panas, Martin L. Culpepper

J. Micro Nano-Manuf. March 2021, 9(1): 010902.

Paper No: JMNM-20-1013

DOI: https://doi.org/10.1115/1.4049123

Published Online: February 9, 2021

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Topics: Gages, Manufacturing, Microfabrication, Micromachining, Piezoresistors, Sensors, Silicon, Metals, Etching, Lasers

Journal Articles

Multi-Objective Optimization of Wire-Electric Discharge Machined Ultrathin Silicon Wafers Using Response Surface Methodology for Solar Cell Applications

Divyanshu Bhartiya, Pinal Rana, Meinam Annebushan Singh, Deepak Marla

J. Micro Nano-Manuf. December 2020, 8(4): 041006.

Paper No: JMNM-20-1040

DOI: https://doi.org/10.1115/1.4049362

Published Online: January 18, 2021

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Topics: Damage, Electrical discharge machining, Optimization, Semiconductor wafers, Wire, Response surface methodology, Pareto optimization, Composite materials, Solar cells, Machining

Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng

J. Micro Nano-Manuf. June 2020, 8(2): 024501.

Paper No: JMNM-19-1045

DOI: https://doi.org/10.1115/1.4046377

Published Online: March 27, 2020

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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness

Journal Articles

Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives

Nick H. Duong, Jianfeng Ma, Muhammad P. Jahan, Shuting Lei, Vamshi Krishna Kore, Murali Sundaram

J. Micro Nano-Manuf. March 2020, 8(1): 014501.

Paper No: JMNM-18-1069

DOI: https://doi.org/10.1115/1.4045762

Published Online: February 19, 2020

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Topics: Abrasives, Finite element methods, Machining, Phase transitions, Silicon, Vibration, Friction, Particulate matter

Journal Articles

A Study of Scratch Speed Effects on Ductile–Brittle Transition in Silicon

Chirag Alreja, Sathyan Subbiah

J. Micro Nano-Manuf. June 2019, 7(2): 024505.

Paper No: JMNM-18-1042

DOI: https://doi.org/10.1115/1.4043647

Published Online: July 25, 2019

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Topics: Brittleness, Diamond turning, Ductile-brittle transition, Fracture (Materials), Silicon, Density, Cutting

Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun

J. Micro Nano-Manuf. March 2019, 7(1): 010301.

Paper No: JMNM-19-1015

DOI: https://doi.org/10.1115/1.4043692

Published Online: May 17, 2019

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Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes

Journal Articles

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Martin Ward, Michael Cullinan

J. Micro Nano-Manuf. March 2019, 7(1): 011003.

Paper No: JMNM-18-1067

DOI: https://doi.org/10.1115/1.4043420

Published Online: May 15, 2019

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Topics: Design, Engineering prototypes, Fracture (Materials), Semiconductor wafers, Silicon, Stress, Surface roughness, Tension, Thin films, Wedges

Journal Articles

Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries

Fenfen Wang, Xianfeng Gao, Lulu Ma, Chris Yuan

J. Micro Nano-Manuf. March 2019, 7(1): 011001.

Paper No: JMNM-18-1032

DOI: https://doi.org/10.1115/1.4042383

Published Online: April 15, 2019

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Topics: Emissions, Lithium-ion batteries, Nanoparticles, Nanowires, Particulate matter, Silicon, Metals, Water, Chemical etching, Etching

Journal Articles

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Chirag Alreja, Sathyan Subbiah

J. Micro Nano-Manuf. December 2018, 6(4): 041001.

Paper No: JMNM-17-1039

DOI: https://doi.org/10.1115/1.4041508

Published Online: October 10, 2018

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Topics: Crystals, High temperature, Phase transitions, Pressure, Silicon, Temperature, Diamond turning, Diamonds

Journal Articles

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato

J. Micro Nano-Manuf. September 2017, 5(3): 031004.

Paper No: JMNM-16-1072

DOI: https://doi.org/10.1115/1.4036828

Published Online: June 7, 2017

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Topics: Crystals, Machining, Polishing, Semiconductor wafers, Silicon

Journal Articles

Material Dependence of the Contact Behavior of Oscillating Microprobes—Modeling and Experimental Evidence

Sebastian Bohm, Boris Goj, Lars Dittrich, Lothar Dressler, Martin Hoffmann

J. Micro Nano-Manuf. June 2017, 5(2): 021002.

Paper No: JMNM-16-1043

DOI: https://doi.org/10.1115/1.4035619

Published Online: March 2, 2017

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Topics: Actuators, Adhesion, Damping, Energy dissipation, Modeling, Oscillations, Phase shift, Probes, Sensors, Simulation

Journal Articles

Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches

Sven Hildering, Ulf Engel, Marion Merklein

J. Micro Nano-Manuf. June 2015, 3(2): 021001.

Paper No: JMNM-14-1052

DOI: https://doi.org/10.1115/1.4029629

Published Online: June 1, 2015

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Topics: Copper foil, Cutting, Errors, Silicon, Stress, Blanking (Metalworking), Simulation, Tension

Journal Articles

Fabrication of Polymer-Derived Silicon Oxycarbide Microparts and Their Mechanical Characteristics

Takahiro Namazu, Hiroyuki Kudara, Yoshio Hasegawa

J. Micro Nano-Manuf. December 2014, 2(4): 044501.

Paper No: JMNM-14-1013

DOI: https://doi.org/10.1115/1.4027734

Published Online: July 9, 2014

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Topics: Casting, Cycles, Firing, Gears, Manufacturing, Mechanical properties, Microgears, Nanoindentation, Polymers, Silicon

Journal Articles

Effect of Micro-Injection Molding Processing Conditions on the Replication and Consistency of a Dense Network of High Aspect Ratio Microstructures

John W. Rodgers, Meghan E. Casey, Sabrina S. Jedlicka, John P. Coulter

J. Micro Nano-Manuf. March 2014, 2(1): 011006.

Paper No: JMNM-13-1023

DOI: https://doi.org/10.1115/1.4026606

Published Online: February 20, 2014

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Topics: Cavities, Columns (Structural), Flow (Dynamics), Microscale devices, Molding, Polymers, Temperature, Tooling, Gates (Closures), Manufacturing

Journal Articles

Characterization of Delamination in Laser Microtransfer Printing

Ala'a M. Al-okaily, John A. Rogers, Placid M. Ferreira

J. Micro Nano-Manuf. March 2014, 2(1): 011002.

Paper No: JMNM-13-1065

DOI: https://doi.org/10.1115/1.4026238

Published Online: January 17, 2014

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Topics: Delamination, Inks, Laser beams, Lasers, Printing, Silicon, Temperature

Journal citation

NARROW

Manuscript

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Metal Assisted Chemical Etch of Polycrystalline Silicon

Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Multi-Objective Optimization of Wire-Electric Discharge Machined Ultrathin Silicon Wafers Using Response Surface Methodology for Solar Cell Applications

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives

A Study of Scratch Speed Effects on Ductile–Brittle Transition in Silicon

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Material Dependence of the Contact Behavior of Oscillating Microprobes—Modeling and Experimental Evidence

Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches

Fabrication of Polymer-Derived Silicon Oxycarbide Microparts and Their Mechanical Characteristics

Effect of Micro-Injection Molding Processing Conditions on the Replication and Consistency of a Dense Network of High Aspect Ratio Microstructures

Characterization of Delamination in Laser Microtransfer Printing

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