... such mechanisms. The motivation of this work is to increase the sensitivity of a micromachined capacitive accelerometer and a minute mechanical force sensor using DaCMs. A lumped spring-mass-lever (SML) model, which effectively captures the effects of appending a DaCM to a sensor, is introduced. This model...

... finishing for the reduction of the sensitivity of gears to misalignments in regard to maximum tooth contact pressure and transmission errors should be applied. By the use of the combination of machine-tool settings to reduce the sensitivity of gears to misalignments in regard to transmission errors...