A high performance and cost effective biosensor is designed using a radial contour-mode disk resonator (RCDR). This sensor measures tiny biological mass attached on a disk vibrating at a high frequency, producing high quality of output signal. A series of analysis and simulation models is developed to predict the mass sensitivity, dynamic stability, and motional resistance of the RCDR biosensor with given geometry and signal input. In order to decrease motional resistance while keeping the fabrication cost low, a layer of dielectric material is deposited within the capacitor gap. In designing the RCDR biosensors, we employ Type I, II, and III robust design approach to design a device that is insensitive to various types of uncertainty associated with the fabrication processes and analysis models. A mathematical construct, error margin index, is employed for this robust design. Traditional optimization and robust design approaches are separately formulated, solved, and compared. From the design results, we observe that the RCDR is a promising bio-sensing device compared to the existing ones.
Issue Section:
Research Papers
References
1.
Grieshaber
, D.
, MacKenzie
, R.
, Vörös
, J.
, and Reimhult
, E.
, 2008, “Electrochemical Biosensors-Sensor Principles and Architectures
,” Sensors
, 8
(3
), pp. 1400
–1458
.2.
Trojanowicz
, M.
, 2009, “Main Concepts of Chemical and Biological Sensing,” Combinatorial Methods for Chemical and Biological Sensors, pp. 25–60.3.
Janata
, J.
, 2009, Principles of Chemical Sensors
, Springer
, New York
.4.
Hoummady
, M.
, Campitelli
, A.
, and Wlodarski
, W.
, 1997, “Acoustic Wave Sensors: Design, Sensing Mechanisms and Applications
,” Smart Mater. Struct.
6
(6
), pp. 647
–657
.5.
Koller-Lucae
, S.
, 1999, “Resonating Viscosity Sensors: Micro Versus Macro Approach
,” Ph.D. thesis, ETH, Zurich.6.
Nirschl
, M.
, Blüher
, A.
, Erler
, C.
, Katzschner
, B.
, Vikholm-Lundin
, I.
, Auer
, S.
, Vörös
, J.
, Pompe
, W.
, Schreiter
, M.
, and Mertig
, M.
, 2009, “Film Bulk Acoustic Resonators for DNA and Protein Detection and Investigation of In Vitro Bacterial S-Layer Formation
,” Sens. Actuators, A
, 156
(1
), pp. 180
–184
.7.
Ogi
, H.
, Naga
, H.
, Fukunishi
, Y.
, Hirao
, M.
, and Nishiyama
, M.
, 2009, “170-MHz Electrodeless Quartz Crystal Microbalance Biosensor: Capability and Limitation of Higher Frequency Measurement
,” Anal. Chem.
, 81
(19
), pp. 8068
–8073
.8.
Tigli
, O.
, and Zaghloul
, M. E.
, 2010, “Surface Acoustic Wave (SAW) Biosensors
,” Proceedings of the 53rd IEEE International Midwest Symposium on Circuits and Systems (MWSCAS)
, Seattle, WA, pp. 77
–80
.9.
Lazcka
, O.
, Campo
, F. J. D.
, and Muñoz
, F. X.
, 2007, “Pathogen Detection: A Perspective of Traditional Methods and Biosensors
,” Biosens. Bioelectron.
, 22
(7
), pp. 1205
–1217
.10.
Johnson
, R. A.
, 1983, Mechanical Filters in Electronics
, Wiley
, New York
.11.
Clark
, J. R.
, Hsu
, W. T.
, Abdelmoneum
, M. A.
, and Nguyen
, C. T. C.
, 2005, “High-Q UHF Micromechanical Radial-Contour Mode Disk Resonators
,” J. Microelectromech. Syst.
, 14
(6
), pp. 1298
–1310
.12.
Clark
, J. R.
, Abdelmoneum
, M. A.
, and Nguyen
, C. T. C.
, 2003, “UHF High-Order Radial-Contour-Mode Disk Resonators
,” Proceedings of the IEEE International Frequency Control Symposium and PDA Exhibition Jointly With the 17th European Frequency and Time Forum
, Tampa, Florida, pp. 802
–809
.13.
Clark
, J. R.
, Wan-Thai
, H.
, and Nguyen
, C. T. C.
, 2000, “High-Q VHF Micromechanical Contour-Mode Disk Resonators
,” Tech. Dig. – Int. Electron. Devices Meet.
, San Francisco, California, pp. 493
–496
.14.
Heitmann
, V.
, Reib
, B.
, and Wegener
, J.
, 2007, “The Quartz Crystal Microbalance in Cell Biology: Basics and Applications
,” Piezoelectric Sensors
, 5
, pp. 303
–338
.15.
Ward
, M. D.
, and Delawski
, E. J.
, 1991, “Radial Mass Sensitivity of the Quartz Crystal Microbalance in Liquid Media
,” Anal. Chem.
, 63
(9
), pp. 886
–890
.16.
Xu
, T.
, Wang
, Z.
, Miao
, J.
, Yu
, L.
, and Li
, C. M.
, 2008, “Micro-Machined Piezoelectric Membrane-Based Immunosensor Array
,” Biosens. Bioelectron.
, 24
(4
), pp. 638
–643
.17.
Zuniga
, C.
, Rinaldi
, M.
, Khamis
, S. M.
, T. S., Jones
, T. S.
, Johnson
, A. T.
, and Piazza
, G.
, 2009, “DNA-Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant-MEMS Gravimetric Sensor
,” Proceedings of 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
, Sorrento, Italy, pp. 320
–323
.18.
Shavezipur
, M.
, Ponnambalam
, K.
, Khajepour
, A.
, and Hashemi
, S. M.
, 2008, “Fabrication Uncertainties and Yield Optimization in MEMS Tunable Capacitors
,” Sens. Acutators, A
, 147
(2
), pp. 613
–622
.19.
Dewey
, A.
, Ren
, H.
, and Zhang
, T.
, 2000, “Behavioral Modeling of Microelectromechanical Systems (MEMS) With Statistical Performance-Variability Reduction and Sensitivity Analysis
,” IEEE Trans. Circuits Syst., II: Analog Digital Signal Process
, 47
(2
), pp. 105
–113
.20.
Fan
, Z.
, Wang
, J.
, and Goodman
, E.
, 2005, “An Evolutionary Approach for Robust Layout Synthesis of MEMS
,” Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics
, Monterey, California, pp. 1186
–1191
.21.
Olivieri
, M.
, Scotti
, G.
, and Trifiletti
, A.
, 2005, “A Novel Yield Optimization Technique for Digital CMOS Circuits Design by Means of Process Parameters Run-Time Estimation and Body Bias Active Control
,” IEEE Trans. Very Lagre Scale Integr. (VLSI) Syst.
, 13
(5
), pp. 630
–638
.22.
Shavezipur
, M.
, Ponnambalam
, K.
, Hashemi
, S. M.
, and Khajepour
, A.
, 2008, “A Probabilistic Design Optimization for MEMS Tunable Capacitors
,” Microelectron. J.
, 39
(12
), pp. 1528
–1533
.23.
Sigmund
, O.
, 2009, “Manufacturing Tolerant Topology Optimization
,” Acta Mech. Solida Sinica
, 25
(2
), pp. 227
–239
.24.
Allen
, J. K.
, Seepersad
, C.
, Choi
, H. J.
, and Mistree
, F.
, 2006, “Robust Design for Multiscale and Multidisciplinary Applications
,” ASME J. Mech. Des.
, 128
(4
), pp. 832
–843
.25.
Janshoff
, A.
, Galla
, H.-J.
, and Steinem
, C.
, 2000, “Piezoelectric Mass-Sensing Devices as Biosensors—An Alternative to Optical Biosensors?
,” Angew. Chem.
, 39
(22
), pp. 4004
–4032
.26.
Huang
, S.
, Yang
, H.
, Lakshmanan
, R. S.
, Johnson
, M. L.
, Wan
, J.
, Chen
, I. H.
, Wikle Iii
, H. C.
, Petrenko
, V. A.
, Barbaree
, J. M.
, and Chin
, B. A.
, 2009, “Sequential Detection of Salmonella Typhimurium and Bacillus Anthracis Spores Using Magnetoelastic Biosensors
,” Biosens. Bioelectron.
, 24
(6
), pp. 1730
–1736
.27.
Ivanovska
, I. L.
, de Pablo
, P. J.
, Ibarra
, B.
, Sgalari
, G.
, MacKintosh
, F. C.
, Carrascosa
, J. L.
, Schmidt
, C. F.
, and Wuite
, G. J. L.
, 2004, “Bacteriophage Capsids: Tough Nanoshells With Complex Elastic Properties
,” Proc. Natl. Acad. Sci. U.S.A.
, 101
(20
), pp. 7600
–7605
.28.
Jing
, W.
, Ren
, Z.
, and Nguyen
, C. T. C.
, 2004, “1.156-GHz Self-Aligned Vibrating Micromechanical Disk Resonator
,” IEEE Trans. Ultrason. Eng.
, 51
(12
), pp. 1607
–1628
.29.
Weinstein
, D.
, and Bhave
, S. A.
, 2007, “Internal Dielectric Transduction of a 4.5 GHz Silicon Bar Resonator
,” IEEE International Electron Devices Meeting
, IEEE
, New York
, Vols. 1
and 2
, pp. 415
–418
.30.
Pourkamali
, S.
, Ho
, G. K.
, and Ayazi
, F.
, 2007, “Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic-Wave Resonators; Part II: Measurement and Characterization
,” IEEE Trans. Electron Devices
, 54
(8
), pp. 2024
–2030
.31.
Khine
, L.
, and Palaniapan
, M.
, 2009, “High- Q Bulk-Mode SOI Square Resonators with Straight-Beam Anchors
,” J. Micromech. Microeng.
, 19
(1
), p. 015017
.32.
Koester
, D.
, Cowen
, A.
, Mahadevan
, R.
, Stonefield
, M.
, and Hardy
, B.
, 2003, MUMPs Design Handbook
, Cronos Integrated Microsystems
, Research Triangle Park, NC
.33.
Bangtao
, C.
, and Miao
, J.
, 2007, “Influence of Deep RIE Tolerances on Comb-Drive Actuator Performance
,” J. Phys. D
, 40
(4
), pp. 970
–976
.34.
Howatson
, A. H.
, 1976, An Introduction to Gas Discharges
, Pergamom
, New York
.35.
Pai
, S. T.
, and Zhang
, Q.
, 1995, Introduction to High Power Pulse Technology
, World Scientific
, Singapore
.36.
Jones
, D. R.
, Schonlau
, M.
, and Welch
, W. J.
, 1998, “Efficient Global Optimization of Expensive Black-Box Functions
,” J. Global Optim.
, 13
(4
), pp. 455
–492
.37.
Marx
, K. A.
, 2003, “Quartz Crystal Microbalance: A Useful Tool for Studying Thin Polymer Films and Complex Biomolecular Systems at the Solution-Surface Interface
,” Biomacromolecules
, 4
(5
), pp. 1099
–1120
.38.
Shen
, W.
, Mathison
, L. C.
, Petrenko
, V. A.
, and Chin
, B. A.
, 2010, “Design and Characterization of a Magnetoelastic Sensor for the Detection of Biological Agents
,” J. Phys. D
, 43
(1
), pp. 015004
–015013
.39.
Bras
, B.
, and Mistree
, F.
, 1995, “A Compromise Decision Support Problem for Axiomatic and Robust Design
,” ASME J. Mech. Des.
, 117
(1
), pp. 10
–19
.40.
Choi
, H.-J.
, Austin
, R.
, Allen
, J. K.
, McDowell
, D. L.
, Mistree
, F.
, and Benson
, D. J.
, 2005, “An Approach for Robust Design of Reactive Powder Metal Mixtures Based on Non-deterministic Micro-Scale Shock Simulation
,” J. Comput.-Aided Mater. Des.
, 12
(1
), pp. 57
–85
.41.
Zimmermann
, C.
, Rebiere
, D.
, Dejous
, C.
, Pistre
, J.
, and Planade
, R.
, 2002, “Love-Waves to Improve Chemical Sensors Sensitivity: Theoretical and Experimental Comparison of Acoustic Modes
,” Proceedings of the IEEE International Frequency Control Symposium & PDA Exhibition
, New Orleans, Louisiana, pp. 281
–288
.Copyright © 2012
by American Society of Mechanical Engineers
You do not currently have access to this content.
