Multilayer thin films of CuNb, CuNi, and CuNbNi with 20 nm individual layer thicknesses were fabricated by magnetron sputtering on oxide coated silicon wafers. The mechanical properties of the films were measured using bulge testing and nanoindentation. Elastic and plastic properties were determined for freestanding films in both square and rectangular window geometries. A finite element model of the window was used to determine the yielding behavior to account for stress concentrations in the membranes. The initial yield in a pressurized membrane, on the order of 400–500 MPa, is approximately one-half of the flow stress inferred from nanoindentation hardness results between 1.9 GPa and 3.4 GPa, and is a result of microscale yielding prior to uniform deformation in these high strength systems.
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October 2009
Predictive Science And Technology In Mechanics And Materials
Yield and Deformation in Biaxially Stressed Multilayer Metallic Thin Films
N. R. Overman,
N. R. Overman
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
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C. T. Overman,
C. T. Overman
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
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H. M. Zbib,
H. M. Zbib
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
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D. F. Bahr
D. F. Bahr
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
Search for other works by this author on:
N. R. Overman
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
C. T. Overman
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
H. M. Zbib
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920
D. F. Bahr
School of Mechanical and Materials Engineering,
Washington State University
, Pullman WA 99164-2920J. Eng. Mater. Technol. Oct 2009, 131(4): 041203 (6 pages)
Published Online: August 27, 2009
Article history
Received:
January 24, 2009
Revised:
March 18, 2009
Published:
August 27, 2009
Citation
Overman, N. R., Overman, C. T., Zbib, H. M., and Bahr, D. F. (August 27, 2009). "Yield and Deformation in Biaxially Stressed Multilayer Metallic Thin Films." ASME. J. Eng. Mater. Technol. October 2009; 131(4): 041203. https://doi.org/10.1115/1.3183775
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