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Keywords: radiative transfer
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2005, 127(3): 564–571.
Published Online: September 18, 2004
... thermal management (packaging) thermal analysis cooling heat transfer radiative transfer ULSI rapid thermal processing Rapid thermal processing (RTP) has been proven to be a core technology in manufacturing ULSI devices such as memory chips, logics, and microprocessors. Due to the shorter...
