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Keywords: atomic-scale polishing
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2024, 146(10): 101008.
Paper No: MANU-24-1089
Published Online: August 29, 2024
... for ultra-precision processing due to deliquescence, brittleness, and low hardness. This article introduces a novel chemo-mechanical slurry designed for achieving atomic-scale polishing of KDP crystals. The slurry employs a combination of polyethylene glycol (PEG) and anhydrous ethanol (AE) to counter...
