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Keywords: CMP
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2024, 146(10): 101008.
Paper No: MANU-24-1089
Published Online: August 29, 2024
.... The datasets generated and supporting the findings of this article are obtainable from the corresponding author upon reasonable request. AE = anhydrous ethanol BBD = Box–Behnken Design CMP = chemical mechanical polishing DW = de-ionized water EDS = energy-dispersive...
