This paper proposes an assembly system for ultraviolet-lithographie galvanik abformung (UV-LIGA) parts with a robotic manipulator. Both images of base part and object part could be obtained simultaneously from an in-house orthogonal optical alignment vision system. Two microgrippers were introduced to realize the reliable clamping. An initial calibration method was presented to ensure assembly accuracy. Assembly experiments were conducted with success rates of 80% and the time consumption of 20 min for all four parts assembly. Suspected causes of failure are motion mechanisms' uncertainty, part dislocation resulted from inertia force when microgripper is moving, and the error which is produced in the detection process because of random factors.

References

1.
Lehr
,
H.
,
1995
,
The LIGA Technique (Commercial Brochure)
,
IMM GmbH
,
Mainz-Hechtsheim, Germany
, pp.
138
145
.
3.
Christenson
,
T. R.
, and
Guckel
,
H.
,
1995
, “
Deep X-Ray Lithography for Micromechanics
,”
Proc. SPIE
2639
, pp.
134
145
.10.1117/12.221271
4.
Madou
,
M. J.
,
2002
,
Fundamentals of Microfabrication
,
CRC Press
,
Boca Raton, FL
, pp.
325
326
.
5.
Popa
,
D. O.
, and
Stephanou
,
H. E.
,
2004
, “
Micro and Mesoscale Robotic Assembly
,”
J. Manuf. Processes
,
6
(
1
), pp.
52
71
.10.1016/S1526-6125(04)70059-6
6.
Chu
,
H. K.
,
Mills
,
J. K.
, and
Cleghorn
,
W. L.
,
2012
, “
Automated Parallel Microassembly for MEMS Application
,”
J. Micromech. Microeng.
,
22
(
3
), p.
035017
.10.1088/0960-1317/22/3/035017
7.
Chu
,
H. K.
,
Mills
,
J. K.
, and
Cleghorn
,
W. L.
,
2010
, “
Parallel Microassembly With a Robotic Manipulation System
,”
J. Micromech. Microeng.
,
20
(
12
), p.
125027
.10.1088/0960-1317/20/12/125027
8.
FC150 Automated Device Bonder Brochure
,” pp.
1
2
, http://www.set-sas.fr/file/fichetechniquefc150.pdf
9.
Aarts
,
A. A. A.
,
Neves
,
H. P.
,
Puers
,
R. P.
, and
Van
,
H. C.
,
2008
, “
An Interconnect for Out-of-Plane Assembled Biomedical Probe Arrays
,”
J. Micromech. Microeng.
,
18
(
6
), p.
064004
.10.1088/0960-1317/18/6/064004
10.
Popa
,
D.
,
Murthy
,
R.
,
Mittal
,
M.
,
Sin
,
J.
, and
Stephanou
,
H.
,
2006
, “
M3-Modular Multi-Scale Assembly System for MEMS Packaging
,” 2006
IEEE/RSJ
International Conference on Intelligent Robots and Systems
, Beijing, China, Oct. 9–15, pp.
3712
3717
.10.1109/IROS.2006.281751
11.
Das
,
A. N.
,
Zhang
,
P.
,
Lee
,
W. H.
,
Popa
,
D.
, and
Stephanou
,
H.
,
2007
, “
μ3: Multiscale, Deterministic Micro-Nano Assembly System for Construction of On-Wafer Microrobots
,” 2007 IEEE
International Conference on Robotics and Automation
, Rome, Italy, Apr. 10–14, pp.
461
466
.
12.
Nelson
,
B. J.
,
Zhou
,
Y.
, and
Vikramaditya
,
B.
,
1998
, “
Sensor-Based Microassembly of Hybrid MEMS Devices
,”
IEEE Control Syst.
,
18
(
6
), pp.
35
45
.10.1109/37.736010
13.
Dechev
,
N.
,
Basha
,
M.
,
Chaudhuri
,
S. K.
, and
Safavi-Naeini
,
S.
,
2006
, “
Microassembly of 3D Micromirrors as Building Elements for Optical MEMS Switching
,”
Proc. SPIE
6376
, p.
63760C
.10.1117/12.686579
14.
Saini
,
R.
,
Jandric
,
Z.
,
Tsui
,
K.
, and
Udeshi
,
T.
,
2004
, “
Assembled Micro-Electromechanical-Systems Microcolumn From a Single Layer Silicon Process
,”
J. Vac. Sci. Technol., B
,
22
(
6
), pp.
3168
3173
.10.1116/1.1815311
15.
Murthy
,
R.
,
Das
,
A.
, and
Popa
,
D. O.
,
2008
, “
ARRIpede: An Assembled Micro Crawler
,”
8th IEEE Conference on Nanotechnology
,
NANO ‘08
, Arlington, TX, Aug. 18–21, pp.
833
836
.10.1109/NANO.2008.248
16.
Lai
,
K. W. C.
,
Chung
,
P. S.
,
Li
,
M.
, and
Li
,
W. J.
,
2004
, “
Automated Micro-Assembly of Surface MEMS Mirrors by Centrifugal Force
,”
2004 International Conference on Intelligent Mechatronics and Automation
, Chengdu, China, Aug. 26–31, pp.
23
28
.10.1109/ICIMA.2004.1384156
17.
Feddema
,
J. T.
, and
Christenson
,
T. R.
,
1999
, “
Parallel Assembly of LIGA Components Tutorial on Modeling and Control of Micro- and Nano-Manipulation
,”
IEEE International Conference on Robotics and Automation
, Detroit, MI, pp.
1
17
.
18.
Tsui
,
K.
,
Geisberger
,
A. A.
,
Ellis
,
E.
, and
Skidmore
,
G. D.
,
2004
, “
Micromachined End-Effector and Techniques for Directed MEMS Assembly
,”
J. Micromech. Microeng.
,
14
(
4
), pp.
542
549
.10.1088/0960-1317/14/4/015
19.
Peshkin
,
M. A.
, and
Sanderson
,
A. C.
,
1988
, “
Planning Robotic Manipulation Strategies for Workpieces That Slide
,”
J. Rob. Autom.
,
4
(
5
), pp.
524
531
.10.1109/56.20437
20.
Latombe
,
J.
,
1991
,
Robot Motion Planning
,
Kluwer Academic Publishers
,
Germany
, pp.
230
239
.10.1007/978-1-4615-4022-9
21.
Erdmann
,
M.
,
1996
, “
An Exploration of Nonprehensile Two-Palm Manipulation
,”
Int. J. Rob. Res.
,
17
(
5
), pp.
485
503
.10.1177/027836499801700502
22.
Akella
,
S.
,
Huang
,
W. H.
,
Lynch
,
K. M.
, and
Mason
,
M. T.
,
1997
, “
Sensorless Parts Feeding With a One Joint Robot
,”
Algorithms for Robotic Motion and Manipulation
,
A. K. Peters
,
Boston, MA
, pp.
229
237
.
23.
Chen
,
J.
,
Goldberg
,
K.
,
Overmars
,
M. H.
,
Halperin
,
D.
,
Bohringer
,
K. F.
, and
Zhuang
,
Y.
,
1998
, “
Shape Tolerance in Feeding and Fixturing
,”
Third International Workshop on Algorithmic Foundations of Robotics
, pp.
297
311
.
24.
Stappen
,
A. F.
,
Berretty
,
R. P.
,
Goldberg
,
K.
, and
Overmars
,
M. H.
,
2001
, “
Geometry and Part Feeding
,”
Modelling of Sensor-Based Intelligent Robot Systems (Lecture Notes in Computer Science)
,
Springer-Verlag
,
Berlin, Germany
, pp.
259
281
.
25.
Boothroyd
,
G.
,
1991
,
Assembly Automation and Product Design
,
Marcel Dekker
,
New York
, pp.
190
198
.
26.
Rizzi
,
A. A.
, and
Hollis
,
R. L.
,
1998
, “
Opportunities for Increased Intelligence and Autonomy in Robotic Systems for Manufacturing
,”
Robotics Research
,
Springer-Verlag
,
London, UK
, pp.
141
151
.10.1007/978-1-4471-1580-9_13
27.
Dewhurst
,
P.
,
Knight
,
W.
, and
Boothroyd
,
G.
,
2001
,
Product Design for Manufacture & Assembly Revised & Expanded
,
Marcel Dekker
,
New York
, pp.
20
29
.
28.
Cheng
,
H. T.
, and
Chen
,
H. P.
,
2014
, “
‘Adult’ Robot Enabled Learning Process in High Precision Assembly Automation
,”
ASME J. Manuf. Sci. Eng.
,
136
(
2
), p.
021011
.10.1115/1.4026084
29.
Witham
,
C. R.
,
Beranek
,
M. W.
,
Carlisle
,
B. R.
,
Chan
,
E. Y.
, and
Koshinz
,
D. G.
,
2000
, “
Fiber-Optic Pigtail Assembly and Attachment Alignment Shift Using a Low-Cost Robotic Platform
,”
50th Technology Conference Electronic Components
, Las Vegas, NV, May 21–24, pp.
21
25
.10.1109/ECTC.2000.853110
30.
Popa
,
D.
,
Kang
,
B. H.
, and
Sin
,
J.
,
2002
, “
Reconfigurable Microassembly System for Photonics Applications
,”
IEEE Conference on Robotics and Automation
, Washington, DC, May 11–15, Vol.
2
, pp.
1495
1500
.
31.
Tang
,
Y.-L.
,
Zhang
,
Z.-J.
,
Ye
,
X.
, and
Zhang
,
X.-F.
,
2014
, “
Micro-Assembly Precise Coaxial Alignment Methodology Based on Surface Roughness and Reflectiveness Matching
,”
Assem. Autom.
,
34
(
2
), pp.
141
150
.10.1108/AA-03-2013-029
32.
Xin
,
Y.
,
Chao
,
S.
,
Zhijing
,
Z.
,
Jun
,
G.
, and
Yang
,
Y.
,
2014
, “
An Air-Filled Microgripper in Microassembly System With Coaxial Alignment Function
,”
Assem. Autom.
,
34
(
4
), pp.
333
341
.10.1108/AA-02-2014-019
33.
Xin
,
Y.
,
Jun
,
G.
,
Zhijing
,
Z.
,
Chao
,
S.
, and
Guangyuan
,
S.
,
2014
, “
An Improved Vision Calibration Method for Coaxial Alignment Microassembly
,”
Assem. Autom.
,
34
(
3
), pp.
237
243
.10.1108/AA-10-2013-092
34.
Ye
,
X.
,
Zhang
,
Z. Z.
, and
Zhang
,
X. F.
,
2011
, “
Force-Pose Nonlinear Mapping Algorithm for Assembling Micro-Mechanical System
,”
Adv. Mater. Res.
,
314–316
, ISSN: 1022-6680, pp.
1829
1835
.10.4028/www.scientific.net/AMR.314-316.1829
35.
Dentinger
,
P. M.
,
Clift
,
W. M.
, and
Goods
,
S. H.
,
2002
, “
Removal of SU-8 Photoresist for Thick Film Applications
,”
Microelectron. Eng.
,
61–62
, ISSN: 0167-9317 pp.
993
1000
.10.1016/S0167-9317(02)00490-2
36.
Sun
,
Y.
,
Zhang
,
Z. J.
, and
Ye
,
X.
,
2011
, “
An Integrated Micro-Gripping System for the Assembly of Miniature
,”
Adv. Mater. Res.
,
317–319
(
Pt. 1
), pp.
750
756
.10.4028/www.scientific.net/AMR.317-319.750
37.
Faig
,
W.
,
1975
, “
Calibration of Close-Range Photogrammetric Systems: Mathematical Formulation
,”
Conference on Photogrammetric Engineering and Remote Sensing
, Vol.
41
, pp.
1479
1486
.
38.
Dainis
,
A.
, and
Juberts
,
M.
,
1985
, “
Accurate Remote Measurement of Robot Trajectory Motion
,” 1985
IEEE
International Conference on Robotics and Automation
, pp.
92
99
.10.1109/ROBOT.1985.1087317
39.
Ganapathy
,
S.
,
1984
, “
Decomposition of Transformation Matrices for Robot Vision
,” 1984
IEEE
International Conference on Robotics and Automation
, pp.
130
139
.10.1109/ROBOT.1984.1087163
40.
Tsai
,
R. Y. A.
,
1987
, “
Versatile Camera Calibration Technique for High-Accuracy 3D Machine Vision Metrology Using Off-the-Shelf TV Camera and Lenses
,”
IEEE J. Rob. Autom.
,
3
(
4
), pp.
323
344
.10.1109/JRA.1987.1087109
41.
Martins
,
H. A.
,
Birk
,
J. R.
, and
Kelley
,
R. B.
,
1981
, “
Camera Models Based on Data From Two Calibration Planes
,”
Comput. Graphics Imaging Process.
,
17
(
2
), pp.
173
180
.10.1016/0146-664X(81)90024-1
42.
Wei
,
G.
, and
Ma
,
S.
,
1991
, “
Two Plane Camera Calibration: A Unified Model
,”
IEEE Computer Society Conference on Computer Vision and Pattern Recognition
,
CVPR ‘91
, Maui, HI, June 3–6, Vol.
3
, pp.
133
138
.10.1109/CVPR.1991.139675
43.
Wu
,
J.
, and
Chu
,
J.
,
2006
, “
Microscope Self-Calibration Technique for Tele-Micromanipulation System
,”
5th International Workshop on Microfactories
, Besancon, France, Oct. 25–27, pp.
184
191
.
44.
Potsaid
,
B.
,
Bellouard
,
Y.
, and
Wen
,
J. T.
,
2005
, “
Design of an Adaptive Scanning Optical Microscope for Simultaneous Large Field of View and High Resolution
,”
2005 IEEE International Conference on Robotics and Automation
,
ICRA
2005, Barcelona, Spain, Apr. 18–22, pp.
460
465
.10.1109/ROBOT.2005.1570161
45.
Hartley
,
R.
,
1997
, “
Self-Calibration of Stationary Cameras
,”
Int. J. Comput. Vision
,
22
(
1
), pp.
5
23
.10.1023/A:1007957826135
46.
Weng
,
J.
, and
Cohen
,
P.
,
1992
, “
Camera Calibration With Distortion Models and Accuracy Evaluation
,”
IEEE Trans. Pattern Anal. Mach. Intell.
,
14
(
10
), pp.
965
980
.10.1109/34.159901
You do not currently have access to this content.