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Keywords: Vapor Deposition
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. October 2002, 124(5): 938–946.
Published Online: September 11, 2002
...Hoseon Yoo; Yogesh Jaluria, Fellow ASME This paper deals with the continuous chemical vapor deposition of silicon in a horizontal cold wall reactor, paying special attention to a moving susceptor. A two-dimensional numerical model, which accounts for variable properties, thermal diffusion...
Journal Articles
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. November 1998, 120(4): 858–864.
Published Online: November 1, 1998
...K. S. Park; M. Choi An analysis of unsteady heat and mass transfer in the modified chemical vapor deposition has been carried out. It is found that the commonly used quasi-steady-state assumption could be used to predict the overall efficiency of particle deposition; however, the assumption would...