A systematic numerical study has been conducted of the mixed convection flow in a novel impinging jet chemical vapor deposition (CVD) reactor for deposition of thin films at atmospheric pressure. The geometry resembles that of a pancake reactor but the inflow gases enter through a small nozzle to provide high inlet momentum. A finite-volume-based computational procedure is used to integrate the governing flow, energy, and scalar transport equations with high accuracy. The effects of the temperature dependent properties are fully accounted for. The effects of operating pressure, wafer rotation rate, and inlet flow rate of the carrier gas are investigated. The main benefit of the new geometry is the suppression of the buoyancy-driven flow even at atmospheric pressures due to the lower mixed convection parameter. We show that the new geometry can produce thin films of high radial uniformity and also with high growth rate. Comparisons are also made with a conventional stagnation flow reactor for which it is shown that beyond a moderate pressure (∼0.1 atm), the flow is dominated by natural convection, and the reactor is unsuitable for practical use.
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Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films
S. P. Vanka,
S. P. Vanka
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
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Gang Luo,
Gang Luo
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
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Nick G. Glumac
Nick G. Glumac
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
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S. P. Vanka
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
Gang Luo
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
Nick G. Glumac
Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801
Contributed by the Heat Transfer Division for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received by the Heat Transfer Division May 21, 2003; revision received January 13, 2004. Associate Editor: A. F. Emery.
J. Heat Transfer. Oct 2004, 126(5): 764-775 (12 pages)
Published Online: November 16, 2004
Article history
Received:
May 21, 2003
Revised:
January 13, 2004
Online:
November 16, 2004
Citation
Vanka , S. P., Luo , G., and Glumac, N. G. (November 16, 2004). "Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films ." ASME. J. Heat Transfer. October 2004; 126(5): 764–775. https://doi.org/10.1115/1.1795232
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