This paper presents an experimental investigation of laminar gas flow through microchannels. The independent variables: relative surface roughness, Knudsen number and Mach number were systematically varied to determine their influence on the friction factor. The microchannels were etched into silicon wafers, capped with glass, and have hydraulic diameters between 5 and 96 μm. The pressure was measured at seven locations along the channel length to determine local values of Knudsen number, Mach number and friction factor. All measurements were made in the laminar flow regime with Reynolds numbers ranging from 0.1 to 1000. The results show close agreement for the friction factor in the limiting case of low Ma and low Kn with the incompressible continuum flow theory. The effect of compressibility is observed to have a mild (8 percent) increase in the friction factor as the Mach number approaches 0.35. A 50 percent decrease in the friction factor was seen as the Knudsen number was increased to 0.15. Finally, the influence of surface roughness on the friction factor was shown to be insignificant for both continuum and slip flow regimes.
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Experimental Investigation of Gas Flow in Microchannels
Stephen E. Turner,
Stephen E. Turner
Naval Undersea Warfare Center, 1176 Howell St., Newport, RI 02841
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Lok C. Lam,
Lok C. Lam
University of Rhode Island, Department of Mechanical Engineering, 203 Wales Hall, Kingston, RI 02881
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Mohammad Faghri,
Mohammad Faghri
University of Rhode Island, Department of Mechanical Engineering, 203 Wales Hall, Kingston, RI 02881
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Otto J. Gregory
Otto J. Gregory
University of Rhode Island, Department of Chemical Engineering, 210 Crawford Hall, Kingston, RI 02881
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Stephen E. Turner
Naval Undersea Warfare Center, 1176 Howell St., Newport, RI 02841
Lok C. Lam
University of Rhode Island, Department of Mechanical Engineering, 203 Wales Hall, Kingston, RI 02881
Mohammad Faghri
University of Rhode Island, Department of Mechanical Engineering, 203 Wales Hall, Kingston, RI 02881
Otto J. Gregory
University of Rhode Island, Department of Chemical Engineering, 210 Crawford Hall, Kingston, RI 02881
Contributed by the Heat Transfer Division for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received by the Heat Transfer Division August 4, 2003; revision received June 8, 2004. Associate Editor: K. D. Kihm.
J. Heat Transfer. Oct 2004, 126(5): 753-763 (11 pages)
Published Online: November 16, 2004
Article history
Received:
August 4, 2003
Revised:
June 8, 2004
Online:
November 16, 2004
Citation
Turner, S. E., Lam , L. C., Faghri, M., and Gregory, O. J. (November 16, 2004). "Experimental Investigation of Gas Flow in Microchannels ." ASME. J. Heat Transfer. October 2004; 126(5): 753–763. https://doi.org/10.1115/1.1797036
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