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Keywords: rapid thermal annealing
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Journal Articles
Article Type: Research Papers
J. Electrochem. En. Conv. Stor. December 2011, 8(6): 061015.
Published Online: September 27, 2011
... interlayer between the film and the Pd substrate. The densification of the crystallized BCYO thin film, which is about 0.5-μm thick, was improved by introducing a UV-assisted MOD process. Rapid thermal annealing (RTA) eliminated the PdO interlayer. In addition, the formation of dense thin films of BCZYO...