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Keywords: semiconductor device manufacture
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 777–785.
Published Online: January 23, 2007
... magnets position control precision engineering process control semiconductor device manufacture A novel electromagnetic-force-generation scheme was developed to operate this maglev stage. In this section, we present the actuation scheme and analyze the forces. This stage has a Y-shaped...
