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Keywords: mictrosystems
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Journal Articles
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. January 2014, 136(1): 011017.
Paper No: DS-12-1140
Published Online: October 18, 2013
... model. robot kinematics robotic manipulators piezoelectric disc vibration measurement mictrosystems There is an increasing demanding of devices capable to position a target with nanometric resolution. Such devices, referred to as microdevices or microstages, are employed in many...