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Keywords: capacitive sensors
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 777–785.
Published Online: January 23, 2007
..., is modeled as a pure mass due to the negligible effect of magnetic spring and damping. There are three laser interferometers and three capacitance sensors to sense the six-axis position/rotation of the platen. A lead-lag compensator was designed and implemented to control each axis. A nonlinear model...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2004, 126(2): 319–326.
Published Online: August 5, 2004
.... , 1998 , “ Fabrication and Characterization of Electrostatically Driven Silicon Microbeams ,” Microelectron. J. , 29 , pp. 641 – 44 . Blanc , N. et al. , 1996 , “ Scanning Force Microscopy in the Dynamic Mode Using Microfabricated Capacitive Sensors ,” J. Vac. Sci. Technol. B , 14 ( 2...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 2000, 122(1): 102–107.
Published Online: January 6, 1999
... 1999 capacitive sensors error analysis rotors Cylindrical Capacitive Sensor Error Analysis Active Magnetic Bearing AMB systems generally require the feedback control of a magnetic force through a measured displacement of a rotor. For the high precision spindle with AMB...
