The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and self-moving ability in precision positioning motion. The contact force between the hammer and the self-moving stage, and the friction force of Leuven’s model caused between the grinded groove and the self-moving stage are considered. The governing equations of the system are formulated by using the finite-element method (FEM). The numerical solutions are provided to compare with the experimental results, and demonstrate the well agreement of the present theoretical formulations.
Issue Section:
Technical Notes
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by ASME
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