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Proceedings Papers

Projection Micromachining of Polyimide Thin Films by an Excimer Laser

X. Zhang, C. P. Grigoropoulos, D. J. Krajnovich, A. C. Tam
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 45-54, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1029
https://doi.org/10.1115/IMECE1996-1029
View Paper titled, Projection Micromachining of Polyimide Thin Films by an Excimer Laser
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Topics: Excimer lasers, Micromachining, Thin films, Etching, Ablation (Vaporization technology), Lasers, Atomic force microscopy, Fluence (Radiation measurement), Resolution (Optics), Absorption
Proceedings Papers

Heat Transfer Characteristics in Polymers With Excimer Laser Irradiation

K. Fushinobu, J. Kimizuka, I. Satoh, Y. Kurosaki
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 39-44, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1028
https://doi.org/10.1115/IMECE1996-1028
View Paper titled, Heat Transfer Characteristics in Polymers With Excimer Laser Irradiation
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Topics: Excimer lasers, Heat transfer, Irradiation (Radiation exposure), Polymers, Lasers, Computer simulation, Temperature, Theoretical analysis, Thermal energy
Proceedings Papers

An Interferometer for Measuring the Surface Displacement of a Reflecting Biological Tissue Surface

Andrew D. Yablon, Norman S. Nishioka, Borivoje B. Mikic, Vasan Venugopalan
Proc. ASME. IMECE96, Advances in Heat and Mass Transfer in Biotechnology, 75-80, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0754
https://doi.org/10.1115/IMECE1996-0754
View Paper titled, An Interferometer for Measuring the Surface Displacement of a Reflecting Biological Tissue Surface
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Topics: Biological tissues, Displacement, Interferometers, Lasers, Mechanical properties, Carbon dioxide lasers, Composite materials, Cornea, Excimer lasers, Gelatin
Proceedings Papers

Pulsed Laser-Induced Ablation of Absorbing Liquids and Acoustic-Transient Generation

Dongsik Kim, Costas P. Grigoropoulos
Proc. ASME. IMECE97, Heat Transfer: Volume 1, 45-54, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0830
https://doi.org/10.1115/IMECE1997-0830
View Paper titled, Pulsed Laser-Induced Ablation of Absorbing Liquids and Acoustic-Transient Generation
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Topics: Ablation (Vaporization technology), Acoustics, Lasers, Transients (Dynamics), Vapors, Plumes (Fluid dynamics), Pressure, Surface deformation, Thermoelasticity, Cathode ray oscilloscopes
Proceedings Papers

Measurement of Laser-Induced Shock Wave in Thin Nickel Foil

Kevin H. Song, Xianfan Xu
Proc. ASME. IMECE98, Heat Transfer: Volume 4 — Heat Transfer in Materials Processing, 79-86, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-0692
https://doi.org/10.1115/IMECE1998-0692
View Paper titled, Measurement of Laser-Induced Shock Wave in Thin Nickel Foil
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Topics: Lasers, Nickel, Shock waves, Pressure, Fluence (Radiation measurement), Evaporation, Excimer lasers, Laser ablation, Metals, Piezoelectric transducers
Proceedings Papers

Femtosecond Excimer (248 NM) Laser Micro-Machining of Teflon (PTFE)

K. P. Adhi, R. L. Owings, T. A. Railkar, W. D. Brown, A. P. Malshe
Proc. ASME. IMECE2001, Manufacturing Engineering, 397-405, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MED-23344
https://doi.org/10.1115/IMECE2001/MED-23344
View Paper titled, Femtosecond Excimer (248 NM) Laser Micro-Machining of Teflon (PTFE)
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Topics: Lasers, Micromachining, Excimer lasers, Fourier transform infrared spectroscopy, Ablation (Vaporization technology), Carbon, Damage, Hydrogen, Oxygen, Photoelectron spectroscopy
Proceedings Papers

Design and Fabrication of High Power Electromagnetic Microactuator With Perpendicular Magnetic Anisotropy

C. T. Pan, S.-C. Shen, H.-P. Chou
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 185-190, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23827
https://doi.org/10.1115/IMECE2001/MEMS-23827
View Paper titled, Design and Fabrication of High Power Electromagnetic Microactuator With Perpendicular Magnetic Anisotropy
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Topics: Ablation (Vaporization technology), Anisotropy, Design, Excimer lasers, Manufacturing, Microactuators, Microelectromechanical systems
Proceedings Papers

Thermal Modeling of the Cavity in Pulsed Excimer Laser Calorimeters

D. H. Chen, Z. M. Zhang
Proc. ASME. IMECE2000, Heat Transfer: Volume 5, 183-186, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1574
https://doi.org/10.1115/IMECE2000-1574
View Paper titled, Thermal Modeling of the Cavity in Pulsed Excimer Laser Calorimeters
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Topics: Cavities, Excimer lasers, Modeling, Heating, Lasers, Calibration, Finite element model, Materials processing, Measurement units and standards, Thermocouples
Proceedings Papers

Ultra-Violet Excimer Laser Micro-Patterning of Polymers

Vijay V. Kancharla, Shaochen Chen
Proc. ASME. IMECE2000, Manufacturing Engineering, 947-949, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1901
https://doi.org/10.1115/IMECE2000-1901
View Paper titled, Ultra-Violet Excimer Laser Micro-Patterning of Polymers
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Topics: Excimer lasers, Micromachining, Polymers
Proceedings Papers

Excimer Laser Micromachining of Silicon and On-Line Machining Depth Discovery Using Laser Interferometry

Senthil Theppakuttai, Shaochen Chen
Proc. ASME. IMECE2000, Manufacturing Engineering, 97-101, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1795
https://doi.org/10.1115/IMECE2000-1795
View Paper titled, Excimer Laser Micromachining of Silicon and On-Line Machining Depth Discovery Using Laser Interferometry
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Topics: Excimer lasers, Interferometry, Lasers, Machining, Micromachining, Silicon, Interferometers, Helium-neon lasers, Light sources, Michelson interferometers
Proceedings Papers

A Quality Study on the Excimer Laser Micromachining of Electro-Thermal-Compliant Micro Devices

Jun Li, G. K. Ananthasuresh
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 687-694, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1164
https://doi.org/10.1115/IMECE2000-1164
View Paper titled, A Quality Study on the Excimer Laser Micromachining of Electro-Thermal-Compliant Micro Devices
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Topics: Excimer lasers, Micromachining, Lasers, Machining, Surface roughness, Actuators, Cutting, Experimental design, Metals, Optical images
Proceedings Papers

Femtosecond Pulsed Laser-Induced Micromachining of Difficult-to-Machine Materials: Diamond a Case Study

A. P. Malshe, A. M. Ozkan, T. A. Railkar, K. P. Adhi, W. D. Brown, P. A. Molian
Proc. ASME. IMECE2000, Manufacturing Engineering, 973-978, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1905
https://doi.org/10.1115/IMECE2000-1905
View Paper titled, Femtosecond Pulsed Laser-Induced Micromachining of Difficult-to-Machine Materials: Diamond a Case Study
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Topics: Diamonds, Lasers, Machinery, Micromachining, Etching, Atomic force microscopy, Damage, Excimer lasers, Irradiation (Radiation exposure), Raman spectroscopy
Proceedings Papers

Parametric Study of the Ablation Characteristics of Absorbing Dielectrics by Short Pulse Laser

Samuel George, Kunal Mitra
Proc. ASME. IMECE2000, Heat Transfer: Volume 3, 179-186, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1475
https://doi.org/10.1115/IMECE2000-1475
View Paper titled, Parametric Study of the Ablation Characteristics of Absorbing Dielectrics by Short Pulse Laser
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Topics: Ablation (Vaporization technology), Dielectric materials, Lasers, Transients (Dynamics), Absorption, Computer simulation, Delays, Diffusion (Physics), Electron configuration, Excimer lasers
Proceedings Papers

Excimer Laser-Machined SU-8 Microstructures for Polydimethylsiloxane (PDMS) Replica Molding

Kewei Liu, Yoontae Kim, Hongseok (Moses) Noh
Proc. ASME. IMECE2014, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A072, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-39177
https://doi.org/10.1115/IMECE2014-39177
View Paper titled, Excimer Laser-Machined SU-8 Microstructures for Polydimethylsiloxane (PDMS) Replica Molding
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Topics: Lasers, Molding, Plasma desorption mass spectrometry, Etching, Fluence (Radiation measurement), Excimer lasers, Firing, Ablation (Vaporization technology), Experimental characterization, Machinery
Proceedings Papers

Microfeature Edge Quality Optimization in Excimer Laser Ablation of Metallic Film

Syed Nadeem Akhtar, J. Ramkumar, S. Anantha Ramakrishna
Proc. ASME. IMECE2013, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T11A038, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-64149
https://doi.org/10.1115/IMECE2013-64149
View Paper titled, Microfeature Edge Quality Optimization in Excimer Laser Ablation of Metallic Film
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Topics: Ablation (Vaporization technology), Excimer lasers, Metallic films, Optimization, Fluence (Radiation measurement), Surface roughness, Design, Integrated circuits, Thin films
Proceedings Papers

Clay Dispersion Effects on Excimer Laser Ablation of Polymer-Clay Nanocomposites

I-Ta Chang, Erol Sancaktar
Proc. ASME. IMECE2011, Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration, 221-225, November 11–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2011-63138
https://doi.org/10.1115/IMECE2011-63138
View Paper titled, Clay Dispersion Effects on Excimer Laser Ablation of Polymer-Clay Nanocomposites
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Topics: Ablation (Vaporization technology), Excimer lasers, Nanocomposites, Polymers, Absorption, Fluence (Radiation measurement), Weight (Mass), Irradiation (Radiation exposure)
Proceedings Papers

Analytical Modeling and Excimer Laser Micromachining of Microchannel for Medical Devices Development

Euiseok Kim, Roger J. Narayan, Yuan-Shin Lee
Proc. ASME. IMECE2010, Volume 3: Design and Manufacturing, Parts A and B, 1037-1047, November 12–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2010-40985
https://doi.org/10.1115/IMECE2010-40985
View Paper titled, Analytical Modeling and Excimer Laser Micromachining of Microchannel for Medical Devices Development
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Topics: Design, Excimer lasers, Lasers, Manufacturing, Medical devices, Microchannels, Micromachining, Modeling
Proceedings Papers

Exploratory Experiments on Machined Riblets for 2-D Compressor Blades

Karsten Oehlert, Joerg R. Seume, Frank Siegel, Andreas Ostendorf, Bo Wang, Berend Denkena, Taras Vynnyk, Eduard Reithmeier, Wolfram Hage, Karsten Knobloch, Robert Meyer
Proc. ASME. IMECE2007, Volume 1: Advances in Aerospace Technology, 25-39, November 11–15, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2007-43457
https://doi.org/10.1115/IMECE2007-43457
View Paper titled, Exploratory Experiments on Machined Riblets for 2-D Compressor Blades
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Topics: Blades, Compressors, Lasers, Skin friction (Fluid dynamics), Grinding, Ablation (Vaporization technology), Cascades (Fluid dynamics), Flat plates, Geometry, Machining
Proceedings Papers

Aspheric Micro-Lens-Array Fabricated by Excimer Laser Dragging

Gou-Jen Wang, Wei-Leun Cheng, Jauh-Jung Yang, Cheng-Tang Pan
Proc. ASME. IMECE2002, Microelectromechanical Systems, 463-467, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-39306
https://doi.org/10.1115/IMECE2002-39306
View Paper titled, Aspheric Micro-Lens-Array Fabricated by Excimer Laser Dragging
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Topics: Excimer lasers, Lenses (Optics), Manufacturing, Ablation (Vaporization technology), Artificial neural networks, Dimensions, Lasers, Shapes
Proceedings Papers

High Precision Femtosecond Laser Micromachining for Rapid Manufacture of MEMS Devices

A. Bulusu, S. P. Joshi, P. S. Shiakolas
Proc. ASME. IMECE2003, Microelectromechanical Systems, 83-87, November 15–21, 2003
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2003-41557
https://doi.org/10.1115/IMECE2003-41557
View Paper titled, High Precision Femtosecond Laser Micromachining for Rapid Manufacture of MEMS Devices
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Topics: Lasers, Microelectromechanical systems, Micromachining, Damage, Ablation (Vaporization technology), Chemical vapor deposition, Databases, Design, Electrical discharge machining, Embossing