Abstract

A sub-millimeter three-component force sensor is developed using silicon microfabrication technology. A polysilicon cross-beam, 300μm by 300μm, with twelve piezoresistive strain gauges integrated on it, is the elastic element of the sensor. The strains detected by the strain gauges are measures of the three orthogonal components of the force applied at the center of the cross-beam. Calibration of the sensor is achieved by generating electromagnetic forces on an aluminum cross-beam that is suspended over the sensor structure.

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