This paper describes a manufacturing technique used to produce semicircular piezoelectric prototypes and the measurement techniques and results for three types of experiments performed to confirm the theoretical models. Since the microactuator design was new, unique and new methods of manufacturing had to be developed. This technique is a four step process that produces a prototype with a thin bonding layer with no bubbles. This prototype was tested and evaluated using three experiments: deflection-voltage, force-voltage, and force-deflection experiments. These experiments verified the theoretical model are correct.
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Copyright © 1991 by The American Society of Mechanical Engineers