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Research Papers

Design, Fabrication, and Characterization of a Continuous Flow Micropump System

[+] Author and Article Information
Ala'aldeen T. Al-Halhouli

Mechatronics Engineering Department,
German Jordanian University,
Amman 11180, Jordan
e-mail: Alaaldeen.AlHalhoul@gju.edu.jo

Stefanie Demming

Institute of Microtechnology,
Technische Universität Braunschweig,
Braunschweig 38106, Germany
e-mail: stefanie.demming@googlemail.com

Andreas Dietzel

Institute of Microtechnology,
Technische Universität Braunschweig,
Braunschweig 38106, Germany
e-mail: a.dietzel@tu-braunschweig.de

Stephanus Büttgenbach

Institute of Microtechnology,
Technische Universität Braunschweig,
Braunschweig 38106, Germany
e-mail: s.buettgenbach@tu-bs.de

1Corresponding author.

Contributed by the Heat Transfer Division of ASME for publication in the JOURNAL OF THERMAL SCIENCE AND ENGINEERING APPLICATIONS. Manuscript received August 6, 2014; final manuscript received September 7, 2015; published online December 4, 2015. Assoc. Editor: Dennis A. Siginer.

J. Thermal Sci. Eng. Appl 8(2), 021006 (Dec 04, 2015) (6 pages) Paper No: TSEA-14-1182; doi: 10.1115/1.4031922 History: Received August 06, 2014; Revised September 07, 2015

This paper presents the design, fabrication, and characterization of a continuous flow micropump system. The system comprises two single pneumatic micropumps connected in parallel and a fluidic capacitor. It has been made of polydimethylsiloxane (PDMS). Each of the pneumatic pumps features a pump chamber, a flexible membrane, and an air chamber. The fluidic capacitor equals a single micropump without air chamber. A maximum flow rate of 496 μL/min is obtained. The influence of the fluidic capacitor is investigated at frequencies of 1 Hz and 3 Hz. The flow rate is considerably smoothened with a smoothing factor of about 0.6.

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References

Figures

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Fig. 1

Schematic view of a microfluidic platform consisting of three modules: a microbioreactor, peripheral microfluidic components, and on-chip biosensors (adapted from Ref. [3])

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Fig. 2

Sectional view of the pneumatic micropump (a), sectional view of the convex check valve (b), and top view of the glass bottom and the two PDMS layers (c) (adapted from Ref. [3])

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Fig. 3

Photograph of the parallel pneumatic micropump

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Fig. 4

Fabrication procedure of the pneumatic micropump: (1) SU-8 adhesion layer, (2) SU-8 structure layer, (3) after development of SU-8, (4) casting of prepolymer/polymerization, and (5)peeling off cured PDMS

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Fig. 5

Schematic view of the test setup for measurement of the micropump

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Fig. 6

Flow rate as function of the operational frequency at different positive pressures p+, fixed negative pressure p = −30 kPa, and backpressure of 0.5 kPa

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Fig. 7

Flow rate as function of the backpressure for different positive pressure p+ at an operation frequency of 3 Hz and fixed negative pressure p = −30 kPa

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Fig. 8

Working principle of the fluidic capacitor: (a) pumping cycle and (b) suction cycle

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Fig. 9

Estimated membrane diameter as a function of the pressure drop

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Fig. 10

Photograph of the modular system consisting of the parallel pneumatic micropump and the fluidic capacitor

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Fig. 11

Flow current at pump frequency of 1 Hz with and without fluidic capacitor

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Fig. 12

Flow current at pump frequency of 3 Hz with and without fluidic capacitor

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